a b s t r a c t Indium oxide films are deposited by pulsed laser deposition in the presence of oxygen atmosphere, on different substrates, namely GaAs, Si, quartz, and glass. The structural, morphological, and interface characteristics are studied. Cubic In 2 O 3 phase is confirmed by high resolutio
โฆ LIBER โฆ
Substrate temperature dependent morphology and resistivity of pulsed laser deposited iridium oxide thin films
โ Scribed by L.M. Zhang; Y.S. Gong; C.B. Wang; Q. Shen; M.X. Xia
- Book ID
- 108289151
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 323 KB
- Volume
- 496
- Category
- Article
- ISSN
- 0040-6090
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