Characterization of zinc oxide thin film
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Norihiro Sakai; Yoshihiro Umeda; Fumiaki Mitsugi; Tomoaki Ikegami
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Article
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2008
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Elsevier Science
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English
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Undoped ZnO, Al-doped ZnO (AZO) and Ga-doped ZnO (GZO) thin films were deposited on silica glass substrate at room temperature in a vacuum by KrF excimer laser (ฮป = 248 nm) pulsed laser deposition method. The transparency of ZnO thin films showed the dependence on deposition area. The relationship b