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Preparation of indium tin oxide films at room temperature by pulsed laser deposition

✍ Scribed by J.P. Zheng; H.S. Kwok

Book ID
107864339
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
756 KB
Volume
232
Category
Article
ISSN
0040-6090

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Undoped ZnO, Al-doped ZnO (AZO) and Ga-doped ZnO (GZO) thin films were deposited on silica glass substrate at room temperature in a vacuum by KrF excimer laser (Ξ» = 248 nm) pulsed laser deposition method. The transparency of ZnO thin films showed the dependence on deposition area. The relationship b