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Laser ablation deposition of titanium nitride films on silicon substrates at room temperature

✍ Scribed by O Auciello; T Barnes; S Chevacharoenkul; A.F Schreiner; G.E McGuire

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 425 KB
Volume: 181
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(89)90473-2

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