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Effects of aluminum doping and substrate temperature on zinc oxide thin films grown by pulsed laser deposition

✍ Scribed by Md Alauddin; Jae Kyu Song; Seung Min Park

Publisher
Springer
Year
2010
Tongue
English
Weight
577 KB
Volume
101
Category
Article
ISSN
1432-0630

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Characterization of zinc oxide thin film
Characterization of zinc oxide thin films prepared by pulsed laser deposition at room temperature
✍ Norihiro Sakai; Yoshihiro Umeda; Fumiaki Mitsugi; Tomoaki Ikegami πŸ“‚ Article πŸ“… 2008 πŸ› Elsevier Science 🌐 English βš– 581 KB

Undoped ZnO, Al-doped ZnO (AZO) and Ga-doped ZnO (GZO) thin films were deposited on silica glass substrate at room temperature in a vacuum by KrF excimer laser (Ξ» = 248 nm) pulsed laser deposition method. The transparency of ZnO thin films showed the dependence on deposition area. The relationship b