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Substrate effects on nanoindentation mechanical property measurement of soft films on hard substrates

โœ Scribed by Tsui, T. Y.; Pharr, G. M.


Book ID
127250326
Publisher
Cambridge University Press
Year
1999
Tongue
English
Weight
367 KB
Volume
14
Category
Article
ISSN
0884-2914

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Effects of the substrate on the determin
โœ Ranjana Saha; William D. Nix ๐Ÿ“‚ Article ๐Ÿ“… 2002 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 511 KB

We examine the effects of the substrate on the determination of mechanical properties of thin films by nanoindentation. The properties of aluminum and tungsten films on the following substrates have been studied: aluminum, glass, silicon and sapphire. By studying both soft films on hard substrates a