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Effects of substrate on determination of hardness of thin films by nanoscratch and nanoindentation techniques

โœ Scribed by Tayebi, Noureddine; Polycarpou, Andreas A.; Conry, Thomas F.

Book ID
121836624
Publisher
Cambridge University Press
Year
2004
Tongue
English
Weight
668 KB
Volume
19
Category
Article
ISSN
0884-2914

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Effects of the substrate on the determin
Effects of the substrate on the determination of thin film mechanical properties by nanoindentation
โœ Ranjana Saha; William D. Nix ๐Ÿ“‚ Article ๐Ÿ“… 2002 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 511 KB

We examine the effects of the substrate on the determination of mechanical properties of thin films by nanoindentation. The properties of aluminum and tungsten films on the following substrates have been studied: aluminum, glass, silicon and sapphire. By studying both soft films on hard substrates a