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Nanoindentation of thin-film-substrate system: Determination of film hardness and Young's modulus

โœ Scribed by Chen Shaohua; Liu Lei; Wang Tzuchiang


Publisher
The Chinese Society of Theoretical and Applied Mechanics; Institute of Mechanics, Chinese Academy of Sciences
Year
2004
Tongue
English
Weight
801 KB
Volume
20
Category
Article
ISSN
0567-7718

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Effects of the substrate on the determin
โœ Ranjana Saha; William D. Nix ๐Ÿ“‚ Article ๐Ÿ“… 2002 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 511 KB

We examine the effects of the substrate on the determination of mechanical properties of thin films by nanoindentation. The properties of aluminum and tungsten films on the following substrates have been studied: aluminum, glass, silicon and sapphire. By studying both soft films on hard substrates a