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The hardness and Young's modulus of a-C:H films

✍ Scribed by X Jiang; K Reichelt; B Stritzker

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 162 KB
Volume: 41
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(90)93963-j

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