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Substrate bias dependence of Raman spectra for TiN films deposited by filtered cathodic vacuum arc

✍ Scribed by Cheng, Y. H.; Tay, B. K.; Lau, S. P.; Kupfer, H.; Richter, F.

Book ID: 118254495
Publisher: American Institute of Physics
Year: 2002
Tongue: English
Weight: 324 KB
Volume: 92
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1491588

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