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Influence of substrate bias on the structure and mechanical properties of ta-C:W films deposited by filtered cathodic vacuum arc

✍ Scribed by Y.H Cheng; B.K Tay; S.P Lau; X Shi

Book ID
108422950
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
557 KB
Volume
146-147
Category
Article
ISSN
0257-8972

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