Influence of substrate bias on the structure and properties of ZrN films deposited by cathodic vacuum arc

✍ Scribed by E.W. Niu; L. Li; G.H. Lv; H. Chen; W.R. Feng; S.H. Fan; S.Z. Yang; X.Z. Yang

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 521 KB
• Volume: 460-461
• Category: Article
• ISSN: 0921-5093
• DOI: 10.1016/j.msea.2007.02.085