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Subminiature silicon integrated electret capacitor microphone

✍ Scribed by Murphy, P.; Hubschi, K.; De Rooij, N.; Racine, C.

Book ID
114533240
Publisher
IEEE
Year
1989
Tongue
English
Weight
323 KB
Volume
24
Category
Article
ISSN
0018-9367

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A silicon subminiature microphone, based on the piezoresistive effect in polysilicon using only one chip, is proposed. The acoustic sensor is fabricated by a technique that is compatible with a slightly modified CMOS process also using a standard micromechanical fabrication technology. The main prod