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Silicon membrane condenser microphone with integrated field-effect transistor

✍ Scribed by E. Graf; W. Kronast; S. Dühring; B. Müller; A. Stoffel


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
1019 KB
Volume
37-38
Category
Article
ISSN
0924-4247

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A new condenser microphone with a p+ sil
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This paper presents the results of investigations which have led to the batch fabrication of a new condenser microphone and the subsequent measurement of its characteristics. With an overall siz of 3 x 4 x 0.8 mm3 including an hybrid JFET, the microphone has an integrated back-chamber and is achieve