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Silicon subminiature microphones with organic piezoelectric layers-fabrication and acoustical behavior

✍ Scribed by Schellin, R.; Hess, G.; Kuehnel, W.; Sessler, G.M.; Fukada, E.

Book ID: 114533003
Publisher: IEEE
Year: 1992
Tongue: English
Weight: 408 KB
Volume: 27
Category: Article
ISSN: 0018-9367
DOI: 10.1109/14.155812

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