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[IEEE TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - San Francisco, CA, USA (24-27 June 1991)] TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - Fabrication of a subminiature silicon condenser microphone using the sacrificial layer technique

✍ Scribed by Scheeper, P.R.; Olthuis, W.; Bergveld, P.

Book ID: 118186898
Publisher: IEEE
Year: 1991
Tongue: English
Weight: 366 KB
Volume: 0
Category: Article
ISBN-13: 9780879425852
DOI: 10.1109/sensor.1991.148898

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