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[IEEE TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - San Francisco, CA, USA (24-27 June 1991)] TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - The effect of corner radius of curvature on the mechanical strength of micromachined single-crystal silicon structures

✍ Scribed by Pourahmadi, F.; Gee, D.; Petersen, K.

Book ID: 118248777
Publisher: IEEE
Year: 1991
Weight: 491 KB
Volume: 0
Category: Article
ISBN-13: 9780879425852
DOI: 10.1109/sensor.1991.148836

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