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Sub-microstructure and surface topography of reactive unbalanced magnetron sputtered titanium and titanium compound thin films

✍ Scribed by S. Carpenter; P.J. Kelly

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 535 KB
Volume: 204
Category: Article
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2009.07.003

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