Synthesis and characterization of titanium hydride thin films obtained by reactive cathodic sputtering

✍ Scribed by G. Meunier; J.P. Manaud; P. Grall

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 354 KB
• Volume: 18
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/0921-5107(93)90147-f

✦ Synopsis

Thin films of titanium hydride were obtained by reactive cathodic sputtering with a titanium target using different compositions of a mixture of hydrogen and argon as sputtering gas. The layered material is quite different from the bulk material: only a poorly crystallized phase with formula Till,. 7 was synthesized at room temperature for all the gas mixtures investigated. The density measured by Rutherford backscattering spectrometry and X-ray absorption is slightly lower than that of the bulk hydride. These titanium hydride films can be used as a binding compound in metal-ceramic brazing.