✦ LIBER ✦

Sub-100 nm electronic devices and quantum-effects research using x-ray nanolithography

✍ Scribed by Henry I. Smith; K. Ismail; M.L. Schattenburg; D.A. Antoniadis

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Gap control in the fabrication of quantu

✍ M. Burkhardt; S. Silverman; Henry I. Smith; D.A. Antoniadis; K.W. Rhee; M.C. Pec 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 601 KB

X-ray masks with large-area 100nm-period

✍ A. Yen; R.A. Ghanbari; Y.-C. Ku; W. Chu; M.L. Schattenburg; J.M. Carter; Henry I 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 396 KB

Fabrication of sub-100nm linewidth x-ray

✍ F. Rousseaux; A.M. Haghiri-Gosnet; B. Kebabi; Y. Chen; H. Launois 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 270 KB