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Gap control in the fabrication of quantum-effect devices using X-ray nanolithography

✍ Scribed by M. Burkhardt; S. Silverman; Henry I. Smith; D.A. Antoniadis; K.W. Rhee; M.C. Peckerar

Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
601 KB
Volume
27
Category
Article
ISSN
0167-9317

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