✦ LIBER ✦
X-ray masks with large-area 100nm-period gratings for quantum-effect device applications
✍ Scribed by A. Yen; R.A. Ghanbari; Y.-C. Ku; W. Chu; M.L. Schattenburg; J.M. Carter; Henry I. Smith
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 396 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0167-9317
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