✦ LIBER ✦
Fabrication of sub-100nm linewidth x-ray masks and replication using synchrotron radiation at super-ACO
✍ Scribed by F. Rousseaux; A.M. Haghiri-Gosnet; B. Kebabi; Y. Chen; H. Launois
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 270 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0167-9317
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