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Sub-100 mn p+/n junction formation using plasma immersion ion implantation

✍ Scribed by X.Y. Qian; N.W. Cheung; M.A. Lieberman; M.I. Current; P.K. Chu; W.L. Harrington; C.W. Magee; E.M. Botnick

No coin nor oath required. For personal study only.

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