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SU-8: a low-cost negative resist for MEMS

✍ Scribed by Lorenz, H; Despont, M; Fahrni, N; LaBianca, N; Renaud, P; Vettiger, P


Book ID
118175318
Publisher
Institute of Physics
Year
1997
Tongue
English
Weight
647 KB
Volume
7
Category
Article
ISSN
0960-1317

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