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Micromachined SU8 negative resist for MMIC applications on low resistivity CMOS substrates

โœ Scribed by Khaled Elgaid; David A. McCloy; Iain G. Thayne


Book ID
114155618
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
200 KB
Volume
67-68
Category
Article
ISSN
0167-9317

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SU-8: a low-cost negative resist for MEM
โœ Lorenz, H; Despont, M; Fahrni, N; LaBianca, N; Renaud, P; Vettiger, P ๐Ÿ“‚ Article ๐Ÿ“… 1997 ๐Ÿ› Institute of Physics ๐ŸŒ English โš– 647 KB