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Low cost transparent SU-8 membrane mask for deep X-ray lithography

✍ Scribed by S. Cabrini; F. Pérennès; B. Marmiroli; A. Olivo; A. Carpentiero; R. Kumar; P. Candeloro; E.Di. Fabrizio


Publisher
Springer-Verlag
Year
2005
Tongue
English
Weight
280 KB
Volume
11
Category
Article
ISSN
0946-7076

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