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Study on the influence of nitrogen on titanium nitride in a dc post magnetron sputtering plasma system

✍ Scribed by Borah, Sankar Moni; Bailung, Heremba; Pal, Arup Ratan; Chutia, Joyanti


Book ID
121465179
Publisher
Institute of Physics
Year
2008
Tongue
English
Weight
534 KB
Volume
41
Category
Article
ISSN
0022-3727

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