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Study on adhesion and electro-optical properties of ITO films on flexible PET substrate

โœ Scribed by TANG, W; WENG, X; WU, Y; DENG, L


Book ID
122525150
Publisher
Nonferrous Metals Society of China
Year
2006
Tongue
English
Weight
274 KB
Volume
25
Category
Article
ISSN
1001-0521

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The effect of different annealing methods on the sheet resistance of indium tin oxide (ITO) on polyimide (PI) substrate has been investigated. ITO thin films were prepared by RF magnetron sputtering in pure Ar gas and electro-annealing, this was carried out in the flow of an electric current at seve