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Comparative study on the thickness-dependent properties of ITO and GZO thin films grown on glass and PET substrates

✍ Scribed by J. S. Kim, J. -K. Park, Y. J. Baik, W. M. Kim, J. Jeong, T. -Y. Seong


Book ID
119937023
Publisher
The Korean Physical Society
Year
2012
Tongue
English
Weight
261 KB
Volume
61
Category
Article
ISSN
0374-4884

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## Abstract The properties of Al‐doped ZnO (AZO) thin films deposited by pulsed DC magnetron sputtering under various target power on polyethylene terephthalate (PET) substrates have been investigated. __In situ__ and real‐time spectroscopic ellipsometry (1.5–6.5 eV) has been employed to study the