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Properties of ZnO thin films deposited on (glass, ITO and ZnO:Al) substrates

✍ Scribed by M. Mekhnache; A. Drici; L. Saad Hamideche; H. Benzarouk; A. Amara; L. Cattin; J.C. Bernède; M. Guerioune


Book ID
108269096
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
571 KB
Volume
49
Category
Article
ISSN
0749-6036

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Al-doped ZnO (ZnO:Al) thin films were deposited on Si substrates using the radio-frequency reactive magnetron sputtering technique. Effect of Al contents and annealing treatments on the structural and photoluminescence (PL) properties of ZnO films was investigated. The results showed that crystallin