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Study of the transport of titanium neutrals and ions in the post-discharge of a high power pulsed magnetron sputtering device

✍ Scribed by Poucques, Ludovic de; Imbert, Jean-Christophe; Boisse-Laporte, Caroline; Bretagne, Jean; Ganciu, Mihai; Teulé-Gay, Lionel; Touzeau, Michel

Book ID: 121474052
Publisher: Institute of Physics
Year: 2006
Tongue: English
Weight: 974 KB
Volume: 15
Category: Article
ISSN: 0963-0252
DOI: 10.1088/0963-0252/15/4/010

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