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Study of the thermal stability of carbon nitride thin films prepared by reactive magnetron sputtering

✍ Scribed by Fernández-Ramos, C.; Sayagués, M.J.; Rojas, T.C.; Alcalá, M.D.; Real, C.; Fernández, A.

Book ID
123121808
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
304 KB
Volume
9
Category
Article
ISSN
0925-9635

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