Study of the deep level related to a pla
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Y. Kamiura; Y. Iwagami; K. Fukuda; Y. Yamashita; T. Ishiyama; Y. Tokuda
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Article
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2003
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Elsevier Science
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English
β 167 KB
We have applied a novel technique to combine isothermal deep-level transient spectroscopy (DLTS) with the application of uniaxial compressive stress to studying the structure of a platinum-and hydrogen-related defect, which has a gap state at 0.14 eV below the conduction band in Si. The application