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Study of defect engineering in the initial stage of SIMOX processing

✍ Scribed by R. Kögler; A. Mücklich; L. Vines; D. Krecar; A. Kuznetsov; W. Skorupa

Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
339 KB
Volume
257
Category
Article
ISSN
0168-583X

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