Gettering layer for oxygen accumulation in the initial stage of SIMOX processing

✍ Scribed by Xin Ou; Reinhard Kögler; Wolfgang Skorupa; Wolfhard Möller; Xi Wang; Jürgen W. Gerlach

• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 484 KB
• Volume: 267
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2009.01.029