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Study of atomic transport mechanism of oxygen during thermal nitridation of silicon dioxide

✍ Scribed by A. Serrari; J.L. Chartier; R. Le Bihan; S. Rigo; J.C. Dupuy

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Thermal nitridation of anodic silicon di

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Study of atomic transport mechanisms dur

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SIMS study of rapid thermal nitridation

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SIMS study of rapid nitridation of silic

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