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Study of a low voltage electrostatic electron beam probe system

✍ Scribed by T.T. Tang; C. Yan; H. Wang


Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
377 KB
Volume
9
Category
Article
ISSN
0167-9317

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It 1s shown that the imgmcnlrttlon palrcrn of fKsH& produced by low-cncrgy clccrron lmprcl mmwrion m ZI modulated beam mass spectrometer IS 3 SCIISI~IVC lunction of 111~ mWd gas kmpcraturc. Under these condltlons, mats spcctromcfry lends 1tsclCqui1c gcncrrdly IO the study of cncrg dcposulon and exch