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Computational simulation of an electrostatic aberration corrector for a low-voltage scanning electron microscope

✍ Scribed by L.A Baranova; F.H Read; D Cubric

Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 376 KB
Volume: 519
Category: Article
ISSN: 0168-9002
DOI: 10.1016/j.nima.2003.11.118

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