Influence of process parameters on hydro
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David Rio; Laurent Siegert; Samir Derrough; Christophe Constancias; Béatrice Ica
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Article
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2010
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Elsevier Science
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English
⚖ 386 KB
In the frame of the European project MAGIC, a massively multibeam tool working at 5 kV is under installation in LETI premises. Because of its high resolution capability and suitable high exposure dose, hydrogen silsesquioxane (HSQ) is a good candidate for evaluating tool performances. In order to pr