✦ LIBER ✦
Systematic study of the interdependence of exposure and development conditions and kinetic modelling for optimizing low-energy electron beam nanolithography
✍ Scribed by M.A. Mohammad; T. Fito; J. Chen; S. Buswell; M. Aktary; M. Stepanova; S.K. Dew
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 569 KB
- Volume
- 87
- Category
- Article
- ISSN
- 0167-9317
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