✦ LIBER ✦
The electron-beam column for a high-dose and high-voltage electronbeam exposure system Ex-7: S Tamamushi et al,J Vac Sci Technol,B6, 1988, 209–212
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 153 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0042-207X
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