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Studies on the effect of hydrogen doping during deposition of Al:ZnO films using RF magnetron sputtering

✍ Scribed by Bojanna P. Shantheyanda; Kalpathy B. Sundaram; Narendra S. Shiradkar

Book ID: 119330642
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 977 KB
Volume: 177
Category: Article
ISSN: 0921-5107
DOI: 10.1016/j.mseb.2012.08.026

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