Effect of Rapid Thermal Annealing on Al Doped n -ZnO Films Grown by RF-Magnetron Sputtering

✍ Scribed by Kim, Kyoung-Kook; Tampo, Hitoshi; Song, June-O; Seong, Tae-Yeon; Park, Seong-Ju; Lee, Ji-Myon; Kim, Sang-Woo; Fujita, Shizuo; Niki, Shigeru

• Book ID: 126637789
• Publisher: Institute of Pure and Applied Physics
• Year: 2005
• Tongue: English
• Weight: 328 KB
• Volume: 44
• Category: Article
• ISSN: 0021-4922
• DOI: 10.1143/JJAP.44.4776