Influence of rapid thermal annealing on surface texture-etched Al-doped ZnO films prepared by various magnetron sputtering methods

✍ Scribed by Tadatsugu Minami; Tomoyasu Hirano; Toshihiro Miyata; Jun-ichi Nomoto

• Book ID: 113937352
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 947 KB
• Volume: 520
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2011.10.067