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Microstructure and properties of Al-doped ZnO thin films by nonreactive DC magnetron sputtering at room temperature following rapid thermal annealing

✍ Scribed by Hua Wang; Jiwen Xu; Mingfang Ren; Ling Yang

Publisher: Springer US
Year: 2009
Tongue: English
Weight: 285 KB
Volume: 21
Category: Article
ISSN: 0957-4522
DOI: 10.1007/s10854-009-9865-8

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