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Studies of chemiluminescence accompanying fluorine atom etching of silicon

✍ Scribed by Donnelly, Vincent M.; Flamm, Daniel L.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Mechanism of ion-assisted etching of sil

✍ J.A. Yarmoff; F.R. McFeely 📂 Article 📅 1987 🏛 Elsevier Science ⚖ 44 KB

Mechanism of ion-assisted etching of sil

✍ J.A. Yarmoff; F.R. McFeely 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 639 KB

Evaluation of Silicon-Chemiluminescence

✍ Zijlstra, P. A.; Beenakker, C. I. M. 📂 Article 📅 1981 🏛 Society for Applied Spectroscopy 🌐 English ⚖ 660 KB

Dc-etching of poly-silicon with fluorine

✍ H-O Blom; C Nender; S Berg; H Norström 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 451 KB

Mechanistic predictions for fluorine etc

✍ Wu, Christine J.; Carter, Emily A. 📂 Article 📅 1991 🏛 American Chemical Society 🌐 English ⚖ 301 KB

Soft x-ray photoemission study of the si

✍ F.R. McFeely; J.F. Morar; F.J. Himpsel 📂 Article 📅 1986 🏛 Elsevier Science ⚖ 84 KB