✦ LIBER ✦

Mechanistic predictions for fluorine etching of silicon(100)

✍ Scribed by Wu, Christine J.; Carter, Emily A.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Test of Marcus Theory Predictions for El

✍ Kolasinski, Kurt W.; Gogola, Jacob W.; Barclay, William B. 📂 Article 📅 2012 🏛 American Chemical Society 🌐 English ⚖ 397 KB

Behavior of fluorine on silicon (100) su

✍ Masanori Ikeda; Sachiya Iwamoto; Naoyuki Nagashima 📂 Article 📅 2000 🏛 John Wiley and Sons 🌐 English ⚖ 135 KB

Dc-etching of poly-silicon with fluorine

✍ H-O Blom; C Nender; S Berg; H Norström 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 451 KB

Chemical Etching of Silicon (100) by Hyd

✍ Bernard M. Gallois; Theodore M. Besmann; Michael W. Stott 📂 Article 📅 1994 🏛 John Wiley and Sons 🌐 English ⚖ 491 KB

Molecular dynamics simulation of fluorin

✍ S. Chiba; T. Aoki; J. Matsuo 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 360 KB

Studies of chemiluminescence accompanyin

✍ Donnelly, Vincent M.; Flamm, Daniel L. 📂 Article 📅 1980 🏛 American Institute of Physics 🌐 English ⚖ 548 KB