Behavior of fluorine on silicon (100) surfaces etched with NH4F aqueous solutions

✍ Scribed by Masanori Ikeda; Sachiya Iwamoto; Naoyuki Nagashima

• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 135 KB
• Volume: 83
• Category: Article
• ISSN: 8756-663X
• DOI: 10.1002/1520-6432(200007)83:7<41::aid-ecjb6>3.0.co;2-r