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Evaluation of Silicon-Chemiluminescence Monitoring as a Novel Method for Atomic Fluorine Determination and End Point Detection in Plasma Etch Systems
✍ Scribed by Zijlstra, P. A.; Beenakker, C. I. M.
- Book ID
- 115359547
- Publisher
- Society for Applied Spectroscopy
- Year
- 1981
- Tongue
- English
- Weight
- 660 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0003-7028
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